AG ASSOCIATES MINIPULSE 310 RAPID THERMAL PROCESSOR

Features and Applications

Manually loaded and capable of processing silicon and III-V substrates up to 75mm in diameter, Minipulse 310 provides solutions to your process development and monitoring needs. Equipped with a graphical user interface to improve operator productivity, Minipulse 310 offers recipe management and system diagnostics.

Major System Features

• Semiconductor grade quartz process chamber
• 21 tungsten halogen lamps in an upper and lower array
• Extended Range Pyrometer: 400